NovaSensor NPH Series

NovaSensor NPH Series

Solid State Low Pressure Sensor

NovaSensor NPH Series of Solid State Low Pressure Sensors consist of an integrated circuit silicon sensor chip housed in a standard TO-8 electrical package that is printed circuit board mountable.The latest techniques in micromachining have been used to ion-implant piezoresistive strain gauges into a wheatstone bridge configuration that is integrally formed on a micromachined silicon diaphragm. As with all NovaSensor silicon sensors, the NPH Series employs SenStable® processing technology, providing excellent output stability. Constant current excitation to the sensor produces a voltage output that is linearly proportional to the input pressure.The user can provide standard signal conditioning circuitry to amplify the 100 mV output signal. The sensor is compatible with most non-corrosive gases and dry air. A laser-trimmed, thick-film resistor network on a hybrid ceramic substrate provides temperature compensation.

Application
  • Process control, P-to-I converters
  • Pneumatic control systems
  • HVAC controls
  • Biomedical: Infusion pumps, sphygmomanometers, respirators
  • Aerospace: Altimeters, barometers, cabin pressure sensors
  • Computer peripherals

Features
  • Solid state, high reliability
  • Standard TO-8 package suitable for PC board mount
  • Low cost, small size
  • Available in gauge, absolute, and differential pressure versions
  • Media compatible with non-corrosive gases and dry air
  • Thermal accuracy FSO 0.5% typical
  • Overpressure capability to five times maximum rated pressure
  • Three standard ranges: 0 to 10 inH2O (0 to 25 mbar), 0 to 1 psi (0 to 0.06 bar), and 0 to 5 psi (0 to 0.34 bar)
  • Nonlinearity 0.05% FSO typical
  • Standard 3/16 in OD pressure port
  • Ceramic substrate with temperature compensation resistors

Specifications

Parameter Value Units Notes
General
Pressure Range 0 to 10 in H2O (0 to 25 mbar) 0 to 2.5 kPa
0 to 1 psi (0 to 7 bar) 0 to 7 kPa
0 to 5 psi (0 to 0.34 bar) 0 to 30 kPa
Maximum Pressure 5x rated pressure (10)
Electrical @ 77°F (25°C) Unless Otherwise Stated
Input Excitation 1.5 mA 2 mA maximum
Insulation Resistance 100 MΩ @ 50 VDC
Input Impedance (12) 3200 Ω ±25%
Output Impedance 5000 Ω ±20%
Bridge Impedance 5000 Ω ±20%
Environmental
Operating Temperature Range(9) -40 to 257 °F (-40°C to 125°C)
Compensated Temperature Range 32 to 158 °F (0°C to 70°C)
Vibration 10 gRMS 20 to 2000 Hz
Shock 100 g 11 milliseconds
Life (Dynamic Pressure Cycle) 1 × 106 cycles
Mechanical(1)
Weight <0.2 oz (<5 g)
Media Compatibility Non-corrosive gases and clean, dry air
Wetted Materials
Top Port Nickel, gold plated Kovar, silicone gel, gold wire, RTV, silicon and glass.
Bottom Port Gold plated Kovar, silicon, glass and RTV(9)

Parameter 2.5 kPa 7 & 30 kPa Units Notes
Min Typ Max Min Typ Max
Performance Parameters(7), Compensated(1)
Offset -8 2 8 -4 2 4 mV
Full Scale (FS) Output:
2.5 kPa 25 50 90 – – – mV 2
7 kPa – – – 50 75 150 mV 2
30 kPa – – – 75 100 125 mV 2
Linearity -1.0 0.1 1.0 -0.25 0.05 0.25 %FSO 3
Hysteresis & Repeatability -0.2 0.05 0.2 -0.2 0.05 0.2 %FSO
Thermal:
Accuracy of Offset -3 0.5 3 -2 0.5 2 %FSO 4
Accuracy of FSO -3 -1 3 -1.5 -0.5 1.5 %FSO 4
Thermal Hysteresis -0.75 0.5 0.75 -0.5 0.2 0.5 %FSO 5
Short-Term Stability of Offset 5 5 µV/V 6, 11
Short-Term Stability of FSO 5 5 µV/V 6, 11
  1. Performance with offset, thermal accuracy of offset, and thermal accuracy of FSO compensation resistors.
  2. FSO with 1.5mA input excitation.
  3. Best fit straight line.
  4. 32°F to 158°F (0°C to 70°C) with reference to 77°F (25°C).
  5. 32°F to 158°F (0°C to 70°C), by design.
  6. Normalized offset/bridge voltage —100 hrs, typical value, not tested in production.
  7. All values measured at 77°F (25°C) and at 1.5 mA, unless otherwise noted.
  8. Reduced performance outside compensation range.
  9. Backside differential tube is nickel or Kovar.
  10. Top side pressure.
  11. Typical specifications are for reference only; absolute values may vary.
  12. For NPH-8, 2.5 kPa gauge (G) and differential (D) sensor, the input impedance is 3400 +/-30%.

Product Documents

Part Numbers
Part Number Description
NPH-8-002.5-A-H TO-8 Package Configuration, Range: 2.5kPa; 10 in H2O, absolute pressure
NPH-8-002.5-G-H TO-8 Package Configuration, Range: 2.5kPa; 10 in H2O, gauge pressure
NPH-8-002.5-D-H TO-8 Package Configuration, Range: 2.5kPa; 10 in H2O, differential pressure
NPH-8-007-A-H TO-8 Package Configuration, Range: 7kPa; 1 psi, absolute pressure
NPH-8-007-G-H TO-8 Package Configuration, Range: 7kPa; 1 psi, gauge pressure
NPH-8-007-D-H TO-8 Package Configuration, Range: 7kPa; 1 psi, differential pressure
NPH-8-030-A-H TO-8 Package Configuration, Range: 30kPa; 4.35psi, absolute pressure
NPH-8-030-G-H TO-8 Package Configuration, Range: 30kPa; 4.35psi, gauge pressure
NPH-8-030-D-H TO-8 Package Configuration, Range: 30kPa; 4.35psi, differential pressure
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